OPTIMIZING VACUUM-BASED THERMAL EVAPORATION OF CHALCOGENIDE COMPOUNDS
Keywords:
Vacuum thermal evaporation, chalcogenide compounds, thin film deposition, phase-change materials, film uniformity, deposition rate, substrate preparation, annealing, optical properties, electrical properties.Abstract
This study focuses on the optimization of vacuum-based thermal evaporation techniques for the deposition of chalcogenide compounds, which are essential materials in applications such as photovoltaics, infrared detectors, and phase-change memory devices. The research explores various parameters affecting the quality of chalcogenide thin films, including vacuum pressure, evaporation temperature, and deposition rate. By refining these parameters, improved uniformity, film thickness control, and enhanced material properties were achieved. The study also examines the impact of substrate preparation and post-deposition annealing on the structural, optical, and electrical characteristics of the films. The findings contribute to the development of more efficient and reliable fabrication processes for high-performance chalcogenide-based devices.
